Thinning and flattening grinding

Super-efficient grinding of 6" single-crystal SiC wafer

Rate:About 60μm/min
Material:Single-crystal SiC wafer
Size:6"
Machine:NSF-350

Super-flatness grinding of single-crystal SiC wafer (Compared to lapping)

Flatness:0.59μm/4"
Material:Single-crystal SiC wafer
Size:4"
Machine:NSF-350


Super mirror surface grinding of single-crystal SiC wafer

Material:Single-crystal SiC wafer
Size:4"
Machine:NSF-350

Roughness:Ra 0.61nm,Rz 4.80nm


Ultra-thin grinding of aluminum ceramics

Parallelism:1μm
Rate:50μm/min

Material: Aluminum ceramics
Size:100×100×0.1mm
Machine:NSF-600

Super-efficient and thin flatness process of pure nickel

Roughness:Ra 0.69nm,Rz 5.12nm
Rate:75μm/min(rough process)

Material:Pure nickel
Size:155×130mm
Machine:NSF-600


Super mirror surface grinding of low thermal expansion glass

Roughness:Ra 0.69nm,Rz 5.12nm
Material:Low thermal expansion glass
Size:φ200×25mm
Machine:NSF-600

Super mirror surface grinding of carbide

Roughness:Ra 0.6nm,Rz 3.9nm
Material:Carbide
Size:φ70mm
Machine:NSF-600


Lapping

Super-efficient and flatness lapping of single-crystal SiC wafer

Rate:1.0μm/min(rough process)
Flatness:0.93μm/4 inches × 3 pieces
Roughness:Ra 0.8nm,Rz 4.9nm

Material:Single-crystal SiC wafer
Size:4 inches ×3 pieces
Machine:PLM-610sh

Super mirror surface lapping of 6" sapphire

Roughness:Ra 0.6nm,Rz 3.9nm
Flatness:0.5μm

Material:Sapphire
Size:6" 
Machine:PLM-610sh


Super mirror surface lapping of aluminum ceramics

Flatness:0.53μm
Roughness:Ra 1.8nm,Rz 11nm

Material:Aluminum ceramics
Size:φ125mm
Machine:PLM-610sh

Super mirror surface lapping of crystallized glass

Roughness:Ra 4.4nm,Rz 0.65nm 
Material:Crystallized glass
Size:φ95mm
Machine:PLM-610sh


Scribing

Scribing of SiC wafers with a roller blade

Rate:100mm/sec
Chipping:Less than 30μm

Material:Single-crystal SiC wafer
Chip size:1.5×1.5×0.15mm
Machine:SPS-LR150・NVK-100

Scribing of SiC wafers using smart beam

Chipping:Less than 5μm
Material:Single-crystal SiC wafer
Chip size:2.0×3.0×0.15mm 
Machine:SPS-LR150・NVK-100


Scribing of LN using smart beam

Chipping:Less than 5μm
Material:LN(Lithium niobate)
Chip size:2.0×2.0×0.15mm
Machine:SPS-LR150・NVK-100

Scribing of LT using smart beam

Chipping:Less than 5μm
Material:LT(Lithium tantalate)
Chip size:2.0×2.0×0.15mm 
Machine:SPS-LR150・NVK-100


Scribing of aluminum nitride with a roller blade

Chipping:Less than 5μm
Material:Aluminum nitride
Chip size:1.0×2.0×0.25mm
Machine:SPS-LR150・NVK-100

Scribing of crystal with a roller blade

Chipping:Less than 5μm
Material:Crystal
Chip size:3.0×3.0×0.3mm
Machine:SPS-LR150・NVK-100


スライシング加工

Super quality slicing using smart beam

Chipping:Less than 10μm
Roughness of slice surface:Ra 2.2nm, Rz 41nm

Material:Hardened glass
Size:80×40×0.7mm
Machine:NAC-555

High efficient grooving

Pitch accuracy:Less than 2μm
Groove width:1mm
Groove depth:4mm
Materials:HPM38
Size:40×40×4mm
Machine:SPG-150BL3-N3


High efficient cutting

Chipping:Less than 0.04mm
Groove width:1mm
Groove depth:25mm
Material:Crystal
Size:190×75×25mm 
Machine:SPG-150BL3-N3



Inquiries

Experts in super-precision machining. If you have any type of machining under consideration, please feel free to consult us.

Consultations are free of charge. For those who are thinking of introducing any equipment, a machining test will basically be available at free of charge.
Provide the sales personnel at one of our local sales office with information about required accuracy, workpiece size and material. We will review your requirements at our technical center and reply to your inquiry.



page top


Copyright NAGASE INTEGREX Co.,Ltd. All Rights Reserved. contact:1333-1 Atobe, Mugegawa-Cho, Seki-shi, Gifu Prefecture 501-2697 TEL:+81-575-46-2323 FAX:+81-575-46-2325