ULTRA PRECISION MICRO GROOVING AND MILLING MACHINE
超2精密微細加工 NIC-74 | 導光盤加工・自由曲面加工に対応
導光板やプリズム加工など世界最高の精度と加工面積。自由曲面への微細加工も可能な1ナノ分解能微細加工機NIC。
Simultaneous 6-axis, 1nm control machining. Various nano-machining on free-curved surface with the tool perpendicular to the surface is possible.
Work material: Non-electrolytic NiP
Free curved surface processing of R500 on the long side and R250 on the short side.Surface roughness 7.5nmRa, 43.4nmRz.
Work material: STAVAX, machined by elliptical oscillating cutting
Fabrication of 10,000 minute grooves with a depth of 1μm and a pitch of 2μm on the free curved surface (logo) with width of 20mm.
The groove pitch accuracy is within ±0.15μm.
Work material: Non-electrolytic NiP
Accuracy in minute grooving is visible at the intersection of cross machining and longitudinal machining. Machining of even 1μm-quadrangular pyramids achieves a sharp intersection.
Work material: Non-electrolytic NiP
Fabrication of 40, 125 grooves with a depth of 2μm and a pitch of 4μm, using a 90°V-tool.
The result of tool transfer to the workpiece shows that the interpolation accuracy of the X-Y axes is about 20nm.
Fabrication of 10,000 grooves with a depth of 1μm and a pitch of 2μm, using a 90°V-tool.
The result of tool transfer to the workpiece shows that the interpolation accuracy of the X-Y-C axes is about 150nm.
Through the unique machining system with ultra-low vibration and constant temperature, machining of micro lenses within a range of ⌀50μm through ⌀500μm is possible. Machining of ultra-high aspect ratio lenses is also possible.
Machining of micro lens arrays (up to 350, 000 pcs. in the past) in a large area is possible. Minimized tool wear and high quality can be ensured.
Rroughness: 2.1nmRa、15.3nmRz
Ultra-fine form machining of free-form surfaces is possible using the three linear axes (X, Y, Z) and tool rotation and swivel axes (A, B, C). Simultaneous 6 axes machining by original control programs.
The three-point support spherical body structure designed using our original IGTARP DESIGN siignificantly reduces vibration amplitude. Improved dynamic rigidity to 2.25 times that of conventional machines. The three active vibration removal system are embedded in the bed.
Newly developed a swivel tool spindle for which the cutting edge position does not change (patent application pending). Minimal interference with the workpiece without reducing machining size and without reducing cutting speed. Capable of elliptical vibration cutting and machining using end mill tools, etc.(OP)
All axes have a non-contact hydrostatic guideway. All linear axes have a ultra-precision linear motor (X, Y, Z). Achieves high speed and high quality for various machining.
Takes up 1/10th less space than conventional nano machines with the same machining area. Saves 1/10th of the energy used by conventional nano machines.
*Compared to conventional nano machines with same machining area (According to NAGASE's survey)
A temperature-controlled covering has been placed on the machine body to minimize the impact of ambient temperature changes. A high-accuracy air conditioner that controls by 0.01℃ keeps the temperature inside the cover constant.
Capable of ultra-precision cutting on free-form surfaces of hardened steel using a single crystal diamond tool.
Versatile processing on various materials is possible.
A tool in rotation is measured with submicron resolution. The tool tip position and diameter are automatically measured. Measurement of deflection of various tools is also possible. Measured data can be checked through numerical data output and visual output (option).
Extensive numerical operation software for machining support and minimizing the degree of dependence on the operator’s technical skills.
Machining of aspherical surfaces and other functional surfaces is also available. Inputting a functional expression enables easy conversion to a CAD/CAM program (optional).
| Machine/Items | Size | Chuck Size | Table Travel | Stroke Table (Y axis) x Cross (X axis) |
X, Y, Z (Vertical) Axis Minimum Unit |
Workpiece Rotation/ Tool Swivel Axis |
X/Y-Axis Rapid Feed Speed | Machine Weight |
|---|---|---|---|---|---|---|---|---|
| mm | mm | mm | nm | ° (degrees) | m/min | ton | ||
| NIC | 74 | 700 x 400 | 700 x 400 | 720 x 420 | 1(0.1) | 0.001 | 20 | 7.8 |
Customers who are thinking of introducing new facilities are welcome to ask us for test machining or visit our factory. Please feel free to consult us. Please inform us of facility conditions, size and material of machining workpieces, machining time, etc. in detail. Depending on the contents of your request, sales personnel in your district will make a proposal to meet your requirements.