Machining example
■ Ultra-mirror surface grinding of aspherical surface lenses
Hard brittle glass can be mirror-finished with nano-order accuracy.
Surface roughness: Ra1nm, Rz7nm, Material: Clear serum, Size: φ250 × 50mm。
■ Ultra-mirror surface grinding of Schmidt corrector plate
The Schmidt corrector plate used in Subaru Telescopes at the National Astronomical Observatory of Japan
Fabrication of free curved surface with 0.2μm-form accuracy
(technology awarded the Prime Minister’s Prize in the Monozukuri Nippon Grand Award)
■ Segmented mirror machining of 30m-class astronomical telescope
Machining of “1000 × 700” fan-shaped segmented mirror
“rms 80nm” achieved only by grinding step and “rms 2nm” by using a polishing unit
■ Segmented mirror machining of 30m-class astronomical telescope
Large reduction in machining time compared to conventional aspherical surface machining time
Shape accuracy below 0.15μm by using a polishing unit
■ Fabrication of φ1600mm-aspherical lens
Ultra-mirror surface finish of meter-size aspherical lens only by grinding step.
Significant reduction in machining time.
Features
1. Superb performance of following up NC command values (1nm, 10nm) and repeatability
Ultimate nano-grinding machine aiming at zero transfer error
The guideway of basic axes, such as the grinding wheel spindle, X/Y/Z axis, etc., that comprise the machine, uses a non-contact and polyhedral constraint static guide thoroughly polished by nano-processing machines and a linear motor. Submicron motion characteristics and repeatability are achieved in the entire machining area.
2. Advanced machine structure, which demonstrates rigidity and repeatability at the machining point, is employed.
Rigid and super-precision machine design allows accurate infeed of hard brittle materials in units of 1nm or 10nm. Each machine unit incorporates a heat target structure principle and is carefully designed taking into consideration long-term machining and changes in peripheral temperature environment.
3. Unparalleled super-precision indexing unit and rotary table (optional)
The super-precision DD indexing table (min. resolution: 2/100000°) compliant with indexing and rotating machining or a super-precision rotary table can be mounted. The rotary table fully utilizing hydrostatic guide technology exhibits outstanding accuracy in machining of heavy and meter-size workpieces. Rotation accuracy in units of submicron is achieved in both axial and radial directions.
4. New design for zero fluctuation influence to achieve a more advanced mirror-finished surface
The actuator of the X, Y and Z axes is driven either by a Nagase original linear motor or ball screws, as you choose.
The super-precision linear motor drive method achieves fast and accurate operation. Furthermore, the combination of the non-contact guide and the non-contact drive can restrict the influence of the mechanical structure on the machining surface and achieve unprecedented quality.
5. Complete elimination of effects of external friction
The high-rigidity spindle and ultra-low vibration motor (originally developed and manufactured by Nagase) especially designed for nano-machines are introduced. In addition, the “Balance Doctor” (optional) for automatic measurement and correction of an unbalanced grinding wheel in rotation and the “Nano Stabilizer” (optional), an active type or passive type of super-precision vibration removal system for restricting external disturbance of 30nm through 50nm caused even from independent foundation, are mounted to achieve mirror-finish quality with almost zero error.
6. Compliant with compound machining and on-the-machine measurement
In addition to grinding wheel machining, ultra-mirror surface milling by mounting a small-diameter spindle unit and super-precision micro machining by mounting a tool holder are possible. A polishing unit can also be mounted in order to achieve ultra-mirror surface quality. When ultra-low vibration characteristics are required, on-the-machine surface form measurement is possible by mounting an optical interferometer.
7. Different kinds of grinding wheel forming units can be mounted
A double cup truer, vertical or horizontal rotary dresser, swivel dresser, etc. can be mounted. In addition, an ELID grinding system can also be mounted.
■ Grinding of φ600-size lens
Only by grinding step, a large-size aspherical lens can be ground with nano-meter surface roughness and submicron form accuracy.
■ On-the-machine measurement
On-the-machine measurement of surface form (surface roughness) is possible on the ultra-low vibration type machine.
■ Polishing unit
Developed to achieve almost zero surface roughness
Lapping of the grinding surface is possible.
Options
■ Various dressers
Various dressers can be arranged on the machine.
■ Super-precision ambient temperature control system “Nanoenviror”
In order to control deformation of the processing machine itself and machining workpieces, the temperature in the ambient environment is controlled in units of 1/100℃ or 1/1000℃.
■ Milling unit
By mounting a small-diameter spindle for milling, minute machining of various surfaces, including micro lens array machining, flat surface machining, mirror-surface cutting of free curved surface and other 3D forms, is possible.
■ Machining of light guiding plate by using diamond tool
By mounting a tool holder, the machine can also be used as a minute processing machine using a single crystal diamond tool, etc. Minute processing of flat surface and free curved surface is possible.
Series model
○ Super-precision forming fabrication machine N2C-1300D (OP)
Large-size nano grinding machine to cope with φ1400-workpieces
Form fabrication of large-size aspherical lenses (with free curved surface) is possible.
○ Super-precision form fabrication machine N2C-158C-S4-PCnc
Ultra-high accuracy grinder with an accuracy of 0.01μm (0.001μm) for 3 axes and compliant with “1500 x 800” workpieces
Super-precision aspherical surface machining, flat surface machining and forming machining of large and long workpieces are possible.
Specifications
| Model/item | Size | Table work area | Table movement amount (in cross & longitudinal directions) |
Table top surface Spindle center |
Min. unit in vertical direction | Min. unit in cross direction | Grinding wheel size (OD x W x ID) |
Grinding wheel spindle |
|---|---|---|---|---|---|---|---|---|
| mm | mm | mm | mm | mm | m/min | kW | ||
| N2C (saddle/column) | 53 | 500×300 | 750×330 | 450 | 0.00001 (0.000001) |
0.00001 （0.000001） |
φ180〜255×8〜19×φ50.8 | 2P |
| 104 | 100×400 | 1200×440 | 400 | 0.00001 | 0.00001 | φ200〜355×25〜38×φ127 | 4P | |
| 125 | 1200×500 | 1500×560 | 730 | 0.00001 | 0.00001 | φ250〜510×38〜50×φ127 | 6P | |
| 156 | 1500×600 | 1800×660 | 1000 | 0.00001 | 0.00001 | φ250〜510×38〜50×φ127 | 6P | |
| 158 | 1500×800 | 1800×860 | 1750 | 0.00001 | 0.00001 | φ250〜510×38〜50×φ127 | 6P | |
| 1400D | φ1400 | 2000×1000 | 1800 | 0.000001 | 0.000001 | φ250〜510×38〜50×φ127 | 6P |
■ Contents and specifications are subject to change without prior notice. The contents of description and pictures may contain optional items. To place an order, check the manufacture specifications for detailed contents.
■ Actual machine accuracy and machining accuracy described on this site may differ depending on the measurement and machining conditions.
■ For further details, you may request specifications, technical information, etc.
■ For resale or export of the product, contact us in advance. Exporting products requires designated procedures as determined by the Foreign Exchange and Foreign Trade Control Law.
■ This product must not be transferred for any purposes of use that prevents international peace and security, or used for one’s own purpose or by any third party.
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Inquiries
Customers who are thinking of introducing new facilities are welcome to ask us for test machining or to visit our factory. Please feel free to consult us. Inform us of your facility conditions, size and material of machining workpieces, machining time, etc., in details.
Sales personnel in your district will make a proposal designed to meet your requirements.
