Keep Breaking the Records
of Optical and Telescope Lenses
The World's Largest Form Fabrication Machine
in Nano-Meter Accuracy
ULTRA PRECISION FORM GENERATION GRINDING MACHINE
「限りなきゼロ」を追求するナガセインテグレックスの「ナノマシン」。最大加工面積⌀1400。大型非球面レンズの研削・ポリッシュ加工が可能な超2精密非球面レンズ研削盤。
Hard brittle glass can be mirror-finished with nano-order accuracy.
Surface roughness: 1nmRa, 7nmRz,
Material: Clearserum,
Size: ⌀250 x 50mm。
The Schmidt corrector plate used in Subaru Telescopes at the National Astronomical Observatory of Japan
Fabrication of free curved surface with 0.2μm-form accuracy
(technology awarded the Prime Minister’s Prize in the Monozukuri Nippon Grand Award)
Machining of "1000 x 700" fan-shaped segmented mirror
"rms 80nm" achieved only by grinding step and "rms 2nm" by using a polishing unit
Large reduction in machining time compared to conventional aspherical surface machining time
Shape accuracy below 0.15μm by using a polishing unit
Ultra-mirror surface finish of meter-size aspherical lens only by grinding step.
Significant reduction in machining time.
The guideway of basic axes, such as the grinding wheel spindle, X/Y/Z axis, etc., that comprise the machine, uses a non-contact and polyhedral constraint static guide thoroughly polished by nano-processing machines and a linear motor. Submicron motion characteristics and repeatability are achieved in the entire machining area.
Rigid and ultra-precision machine design allows accurate infeed of hard brittle materials in units of 1nm or 10nm. Each machine unit incorporates a heat target structure principle and is carefully designed taking into consideration long-term machining and changes in peripheral temperature environment.
The ultra-precision DD indexing table (min. resolution: 2/100000°) compliant with indexing and rotating machining or a ultra-precision rotary table can be mounted. The rotary table fully utilizing hydrostatic guide technology exhibits outstanding accuracy in machining of heavy and meter-size workpieces. Rotation accuracy in units of submicron is achieved in both axial and radial directions.
Only by grinding step, a large-size aspherical lens can be ground with nano-meter surface roughness and submicron form accuracy.
The actuator of the X, Y and Z axes is driven either by a NAGASE original linear motor or ball screws, as you choose.
The super-precision linear motor drive method achieves fast and accurate operation. Furthermore, the combination of the non-contact guide and the non-contact drive can restrict the influence of the mechanical structure on the machining surface and achieve unprecedented quality.
On-the-machine measurement of surface form (surface roughness) is possible on the ultra-low vibration type machine.
The high-rigidity spindle and ultra-low vibration motor (originally developed and manufactured by NAGASE) especially designed for nano-machines are introduced. In addition, the "Balancedoctor" (optional) for automatic measurement and correction of an unbalanced grinding wheel in rotation and the "Nanostabilizer" (optional), an active type or passive type of Ultra-precision vibration removal system for restricting external disturbance of 30nm through 50nm caused even from independent foundation, are mounted to achieve mirror-finish quality with almost zero error.
In addition to grinding wheel machining, ultra-mirror surface milling by mounting a small-diameter spindle unit and super-precision micro machining by mounting a tool holder are possible. A polishing unit can also be mounted in order to achieve ultra-mirror surface quality. When ultra-low vibration characteristics are required, on-the-machine surface form measurement is possible by mounting an optical interferometer.
Developed to achieve almost zero surface roughness
Lapping of the grinding surface is possible.
A double cup truer, vertical or horizontal rotary dresser, swivel dresser, etc. can be mounted. In addition, an ELID grinding system can also be mounted.
Various dressers can be arranged on the machine.
In order to control deformation of the processing machine itself and machining workpieces, the temperature in the ambient environment is controlled in units of 1/100℃ or 1/1000℃.
By mounting a small-diameter spindle for milling, minute machining of various surfaces, including micro lens array machining, flat surface machining, mirror-surface cutting of free curved surface and other 3D forms, is possible.
By mounting a tool holder, the machine can also be used as a minute processing machine using a single crystal diamond tool, etc. Minute processing of flat surface and free curved surface is possible.
Large-size nano grinding machine to cope with ⌀1400-workpieces
Form fabrication of large-size aspherical lenses (with free curved surface) is possible.
Ultra-high accuracy grinder with an accuracy of 0.01μm (0.001μm) for 3 axes and compliant with "1500 x 800" workpieces
Ultra-precision aspherical surface machining, flat surface machining and forming machining of large and long workpieces are possible.
| Machine/Items | Size | Table Travel | Table Working Area (length x width) |
Table Top to Spindle Center |
Vertical Min. set unit | Cross Min. set unit | Wheel Size (OD x W x ID) |
Wheel Axis |
|---|---|---|---|---|---|---|---|---|
| mm | mm | mm | mm | mm | m/min | kW | ||
| N2C | 53 | 500 x 300 | 750 x 330 | 450 | 0.00001 (0.000001) |
0.00001 (0.000001) |
⌀180〜255 x 8〜19 x ⌀50.8 | 2P |
| 104 | 100 x 400 | 1200 x 440 | 400 | 0.00001 | 0.00001 | ⌀200〜355 x 25〜38 x ⌀127 | 4P | |
| 125 | 1200 x 500 | 1500 x 560 | 730 | 0.00001 | 0.00001 | ⌀250〜510 x 38〜50 x ⌀127 | 6P | |
| 156 | 1500 x 600 | 1800 x 660 | 1000 | 0.00001 | 0.00001 | ⌀250〜510 x 38〜50 x ⌀127 | 6P | |
| 158 | 1500 x 800 | 1800 x 860 | 1750 | 0.00001 | 0.00001 | ⌀250〜510 x 38〜50 x ⌀127 | 6P | |
| 1400D | ⌀1400 | 2000 x 1000 | 1800 | 0.000001 | 0.000001 | ⌀250〜510 x 38〜50 x ⌀127 | 6P |
Customers who are thinking of introducing new facilities are welcome to ask us for test machining or visit our factory. Please feel free to consult us. Please inform us of facility conditions, size and material of machining workpieces, machining time, etc. in detail. Depending on the contents of your request, sales personnel in your district will make a proposal to meet your requirements.