ULTRA-PRECISION ROTARY INDEX TABLE
Ultra-Precision Rotary Table and Ultra-Precision Rotary Index
「超精密研削盤」のナガセインテグレックス。加工面積⌀2700で、サブミクロンの回転精度。ナノ加工にも対応できるロータリーインデックステーブル（割出機能は⌀1300まで）をご紹介。
Rotary Tables and Index Tables with Unparalleled Precision and Size
Ultra-precision rotary tables and index tables are elemental technology units developed for microfabrication of optical elements and semiconductor wafer manufacturing, where surface roughness in units of 1 nm and 10 nm must be pursued. The rotary table has a surface blur of less than 0.5 µm, even for a ⌀2,700 size. The indexing table achieves 0.1 µm accuracy in the machining of sin curves on a 1-nanometer control machining center. Using these technologies, NAGASE has developed many unprecedented ultra-precision large lapping machines and indexing grinders.
Features
Rotary Table Precision, Previously Considered to Be Accurate to Even a Few μm, Is Now Achieved at Sub-Micron Levels
≪Features of the Ultra-Precision Vertical Rotary Table≫
- Rotary table bearings employ NAGASE's unique "Non-Contact, Multi-Surface Restrained Hydrostatic Bearings".
- The table surface runout is minimized even when machining large workpieces due to the multi-surface restraining structure.The non-contact structure also allows high rotational accuracy to be maintained for a long period of time.
- While the rotational accuracy of conventional large rotary tables was several micrometers, NAGASE has achieved astonishing rotational accuracy of 0.5 μm in the radial direction and 0.2 μm in the thrust direction for a ⌀2700 size.
- Its vibration-damping structure makes it less susceptible to external disturbances and enables machining with high machining quality.
- The high quality and high rotational accuracy of the large lapping machines enable highly efficient machining with a high abrasive grain action rate.
- It is capable of synchronous control with the X-axis, Y-axis, etc., and is utilized for rotary surface grinding and aspheric lens grinding machines of unprecedentedly large sizes.
Example of Use with ⌀2000 Size Lapping Machine
(rotational accuracy: 1μm or less)
Example of Use on an Aspheric Lens Processing Machine with 1 Nano Resolution
Rotary Flat Surface Machining on an Ultra-Large Double-Column Multifunction Machine
Ultra-Precision Index Table Capable of Achieving Sub-Micron and Nanometer Machining Accuracy
≪Features of the Ultra-Precision Rotary Index Table≫
- High-precision rotary index table with NAGASE's unique construction that enables non-backlash and non-lost motion.
- Sizes from ⌀300 to 800 can be produced.
- By mounting on our various ultra-precision molding grinders and microfabrication machines, it is possible to perform indexing or continuous rotation machining in the vertical or horizontal axis.
- Specifications can be set according to the application, with indexing resolution from 1/1000° to 1/100000° and indexing accuracy from ±1 to 0.3 seconds.
- Continuous rotation speed of 10mi-1 to 200min-1 can also be set.
- It can handle indexing machining with synchronous control with multiple axes such as X-axis and Y-axis.
- NAGASE can produce not only vertical but also horizontal large rotary indexes (this unit is also used in our ultra-precision roll processing machine).
*Please contact our sales or sales engineer for the development of machine improvements or specialized machines using the unit.
Forming Surface Grinding Machine with Vertical Rotary Index
Internal Gear Grinding Machine with Vertical Rotary Index
Ultra-Precision Roll Processing Machine with Horizontal Rrotary Index
Inquiries
For further information, please contact us.We will make a proposal according to your requests.
Customers who are thinking of introducing new facilities are welcome to ask us for test machining or visit our factory. Please feel free to consult us. Please inform us of facility conditions, size and material of machining workpieces, machining time, etc. in detail. Depending on the contents of your request, sales personnel in your district will make a proposal to meet your requirements.